Nanofabrication
- 31 December 1987
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 6 (1-4) , 155-162
- https://doi.org/10.1016/0167-9317(87)90031-1
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Reactive ion etching of GaAs using a mixture of methane and hydrogenElectronics Letters, 1987
- Fabrication of ultrasmall devices on thin active GaAs membranesJournal of Vacuum Science & Technology B, 1987
- Ultrasmall device fabrication using dry etching of gaasMicroelectronic Engineering, 1986
- Very short gate-length GaAs MESFET'sIEEE Electron Device Letters, 1985