Analysis of local structure in amorphous SiNx:H alloy films in terms of x-ray emission spectroscopy
- 1 December 1993
- journal article
- Published by Elsevier in Journal of Non-Crystalline Solids
- Vol. 164-166, 1077-1080
- https://doi.org/10.1016/0022-3093(93)91185-6
Abstract
No abstract availableKeywords
This publication has 8 references indexed in Scilit:
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