The influence of bias on gaseous composition and diamond growth in a hot-filament chemical vapour deposition process
- 14 November 1996
- journal article
- Published by IOP Publishing in Journal of Physics D: Applied Physics
- Vol. 29 (11) , 2759-2762
- https://doi.org/10.1088/0022-3727/29/11/006
Abstract
No abstract availableKeywords
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