Automated laser interferometric ellipsometry and precision reflectometry

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Abstract
A new opto-electronic ellipsometer operating on laser interferometric principles has been developed into an automated system based on a microprocessor. The latter performs the gain and offset calibrations and adjusts the various mode settings, followed by fast on-line data acquisition. Subsequently, data are processed via an interfaced minicomputer. The instrument is unique in providing absolute ellipsometric data. It permits perpendicular incidence ellipsometry, the handling of both vertically and horizontally mounted (liquid) samples, as well as precision reflectometry. Alignment is easily and quickly achieved because the signals are displayed on a cathode ray oscilloscope (CRO) screen. Some of the valuable features of this system are discussed in the light of results obtained in the visible spectrum.

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