Interferometric ellipsometry
- 1 September 1973
- journal article
- Published by IOP Publishing in Journal of Physics E: Scientific Instruments
- Vol. 6 (9) , 822-826
- https://doi.org/10.1088/0022-3735/6/9/013
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Exact ellipsometric measurement of thickness and optical properties of a thin light-absorbing film without auxiliary measurementsSurface Science, 1971
- A theoretical and experimental analysis of the ellipsometerSurface Science, 1969
- Measurement of the thickness and refractive index of very thin films and the optical properties of surfaces by ellipsometryJournal of Research of the National Bureau of Standards Section A: Physics and Chemistry, 1963
- Polarization Properties of Corner Reflectors and Cavities*Journal of the Optical Society of America, 1962