Angular Distribution of Sputtered Material
- 1 January 1960
- journal article
- research article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 31 (1) , 177-179
- https://doi.org/10.1063/1.1735395
Abstract
The angular distribution of material sputtered under normal Hg+‐ion incidence from flat, polycrystalline targets at 100 to 1000 ev was measured and plotted in polar diagrams. The distribution is ``under cosine,'' approaching a cosine distribution, at higher ion energies. Mo and Fe show a more pronounced tendency to eject to the sides than Ni or Pt. Under oblique ion incidence atoms are sputtered preferentially in the forward direction.This publication has 6 references indexed in Scilit:
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