A thermal bimorph micromirror with large bi-directional and vertical actuation
- 1 July 2005
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 122 (1) , 9-15
- https://doi.org/10.1016/j.sna.2005.02.001
Abstract
No abstract availableThis publication has 17 references indexed in Scilit:
- A Two-Axis Electrothermal Micromirror for Endoscopic Optical Coherence TomographyIEEE Journal of Selected Topics in Quantum Electronics, 2004
- Electromagnetically Actuated Mirror Arrays for Use in 3-D Optical Switching ApplicationsJournal of Microelectromechanical Systems, 2004
- Vertical-actuated electrostatic comb drive with in situ capacitive position correction for application in phase shifting diffraction interferometryJournal of Microelectromechanical Systems, 2003
- Endoscopic optical coherence tomographic imaging with a CMOS-MEMS micromirrorSensors and Actuators A: Physical, 2002
- Post-CMOS processing for high-aspect-ratio integrated silicon microstructuresJournal of Microelectromechanical Systems, 2002
- Phase-only micromirror array fabricated by standard CMOS processSensors and Actuators A: Physical, 2001
- Optical coherence tomography (OCT): a reviewIEEE Journal of Selected Topics in Quantum Electronics, 1999
- Optical coherence-gated imaging of biological tissuesIEEE Journal of Selected Topics in Quantum Electronics, 1996
- Micromachined scanning confocal optical microscopeOptics Letters, 1996
- 400-Hz mechanical scanning optical delay lineOptics Letters, 1993