Phase-only micromirror array fabricated by standard CMOS process
- 20 March 2001
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 89 (1-2) , 124-134
- https://doi.org/10.1016/s0924-4247(00)00544-6
Abstract
No abstract availableKeywords
This publication has 10 references indexed in Scilit:
- Self-aligned assembly of microlens arrays with micromirrorsPublished by SPIE-Intl Soc Optical Eng ,1999
- Design and FEM simulation: all-light-processing infrared image transducerPublished by SPIE-Intl Soc Optical Eng ,1999
- Packaging of lenslet array on micromirrorsPublished by SPIE-Intl Soc Optical Eng ,1999
- Flip-chip integration of lenslet arrays on segmented deformable micromirrorsPublished by SPIE-Intl Soc Optical Eng ,1999
- Optical phase modulation using a refractive lenslet array and microelectromechanical deformable mirrorOptical Engineering, 1998
- Continuous-membrane surface-micromachined silicon deformable mirrorOptical Engineering, 1997
- Statistical performance evaluation of electrostatic microactuators for a deformable mirrorPublished by SPIE-Intl Soc Optical Eng ,1996
- Mechanical and optical characterization of thermal microactuators fabricated in a CMOS processPublished by SPIE-Intl Soc Optical Eng ,1995
- Similarities between piezoelectric, thermal and other internal means of exciting vibrationsJournal of Micromechanics and Microengineering, 1993
- Analysis of tip deflection and force of a bimetallic cantilever microactuatorJournal of Micromechanics and Microengineering, 1993