Structural and electrical properties of Ti-Al thin films
- 1 September 1979
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 62 (2) , 151-155
- https://doi.org/10.1016/0040-6090(79)90301-8
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- Conditions for the routine preparation of tantalum/aluminium filmsThin Solid Films, 1975