Search for carbon nitride CNx compounds with a high nitrogen content by electron cyclotron resonance plasma deposition
- 1 February 1994
- journal article
- Published by Elsevier in Diamond and Related Materials
- Vol. 3 (3) , 264-269
- https://doi.org/10.1016/0925-9635(94)90090-6
Abstract
No abstract availableKeywords
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