Micromechanical thermal sensors: Comparison of experimental results and simulations
- 1 May 1997
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- Vol. 15 (3) , 590-596
- https://doi.org/10.1116/1.589297
Abstract
No abstract availableThis publication has 9 references indexed in Scilit:
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