Optical and dielectric properties of dc magnetron sputtered AlN thin films correlated with deposition conditions
- 20 December 1999
- journal article
- Published by Elsevier in Materials Science and Engineering: B
- Vol. 68 (1) , 1-4
- https://doi.org/10.1016/s0921-5107(99)00221-4
Abstract
No abstract availableKeywords
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