Silicon Oxynitride Formation In Nitrous Oxide (N/sub 2/O): The Role Of Nitric Oxide (NO)

Publisher Website

1 January 1993

conference paper
Published by Institute of Electrical and Electronics Engineers (IEEE)

p. 51-52
https://doi.org/10.1109/vlsit.1993.760240

Abstract

No abstract available

This publication has 6 references indexed in Scilit:

Effects of N/sub 2/O anneal and reoxidation on thermal oxide characteristics
IEEE Electron Device Letters, 1992
Highly reliable thin nitrided SiO ₂ films formed by rapid thermal processing in an N ₂ O ambient
Electronics Letters, 1990
Kinetics of Nitrous Oxide Decomposition
Combustion Science and Technology, 1977
The thermal decomposition of nitrous oxide.
Proceedings of the Royal Society of London. Series A. Mathematical and Physical Sciences, 1938
Die Ermittlung des Mechanismus chemischer Reaktionen
Helvetica Chimica Acta, 1935
Recherches sur la décomposition thermique du protoxyde et de l’oxyde d’azote
Journal de Chimie Physique et de Physico-Chimie Biologique, 1926