Reactively sputtered tantalum thin film resistors Part 2. Low energy, low fluence proton radiation damage
- 31 August 1971
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 8 (2) , 101-115
- https://doi.org/10.1016/0040-6090(71)90002-2
Abstract
No abstract availableKeywords
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