Theoretical Model of Phosphorus Incorporation in Silica in Modified Chemical Vapor Deposition
- 1 November 1988
- journal article
- Published by Wiley in Journal of the American Ceramic Society
- Vol. 71 (11) , 914-923
- https://doi.org/10.1111/j.1151-2916.1988.tb07558.x
Abstract
No abstract availableKeywords
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