Tantalum silicide interconnect characterization by surface analytical techniques
- 31 December 1981
- journal article
- Published by Elsevier in Applications of Surface Science
- Vol. 9 (1-4) , 377-387
- https://doi.org/10.1016/0378-5963(81)90049-0
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
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- Self-Registered Molybdenum-Gate MOSFETJournal of the Electrochemical Society, 1968