An improvement of the RI Auger electron thickness gauge for the measurement of thin metal films
- 15 June 1976
- journal article
- Published by Elsevier in Nuclear Instruments and Methods
- Vol. 135 (3) , 473-476
- https://doi.org/10.1016/0029-554x(76)90060-4
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- A new method of thin-film thickness measurement using radioisotope Auger electronsNuclear Instruments and Methods, 1974
- Recoil Particles fromPo210and Their Ionization in Argon and HeliumPhysical Review B, 1956