Characterization of Ta2O5 layers by electron spectroscopy for chemical analysis rutherford backscattering spectrometry, nuclear reaction analysis and optical methods
- 1 August 1989
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 175, 185-189
- https://doi.org/10.1016/0040-6090(89)90826-2
Abstract
No abstract availableKeywords
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