Real time, in-situ ellipsometry solutions using artificial neural network pre-processing
- 1 June 1994
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 245 (1-2) , 167-173
- https://doi.org/10.1016/0040-6090(94)90894-x
Abstract
No abstract availableThis publication has 6 references indexed in Scilit:
- Development of artificial neural networks for real time, in situ ellipsometry data reductionThin Solid Films, 1992
- Closed-loop control of growth of semiconductor materials and structures by spectroellipsometryJournal of Vacuum Science & Technology A, 1992
- In situ ellipsometric study of optical properties of ultrathin filmsApplied Optics, 1992
- Error correction for calibration and data reduction in rotating-polarizer ellipsometry: applications to a novel multichannel ellipsometerJournal of the Optical Society of America A, 1991
- An Algorithm for Least-Squares Estimation of Nonlinear ParametersJournal of the Society for Industrial and Applied Mathematics, 1963
- A method for the solution of certain non-linear problems in least squaresQuarterly of Applied Mathematics, 1944