Structural Investigation of Ti-N Films
- 1 January 1985
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Initial reactions and silicide formation of titanium on silicon studied by Raman spectroscopyJournal of Vacuum Science & Technology A, 1985
- Microhardness of TiNx coatings obtained by reactive cathodic sputteringThin Solid Films, 1981
- Structure and Electrical Properties of Titanium Nitride FilmsJapanese Journal of Applied Physics, 1978
- Least-squares structure refinement based on profile analysis of powder film intensity data measured on an automatic microdensitometerJournal of Applied Crystallography, 1977