Electron spin resonance of separation by implanted oxygen oxides: Evidence for structural change and a deep electron trap
- 8 June 1992
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 60 (23) , 2889-2891
- https://doi.org/10.1063/1.106809
Abstract
We present direct evidence for deep electron traps and structural changes in separation by implanted oxygen (SIMOX) buried oxides and evidence that some positively charged E′ centers are compensated by negatively charged centers in SIMOX oxides.Keywords
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