Energy distributions of metal atoms and monoxide molecules sputtered from oxidized Ta and Nb
- 1 January 1986
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 18 (1-6) , 458-463
- https://doi.org/10.1016/s0168-583x(86)80071-4
Abstract
No abstract availableFunding Information
- Deutsche Forschungsgemeinschaft
This publication has 13 references indexed in Scilit:
- Performance of a new ion optics for quasisimultaneous secondary ion, secondary neutral, and residual gas mass spectrometryJournal of Vacuum Science & Technology A, 1985
- Analysis of solids by secondary ion and sputtered neutral mass spectrometryApplied Physics A, 1985
- The effect of oxygen on the sputtering of metastable atoms and ions from Ba metalSurface Science, 1983
- Quantitative analysis of thin oxide layers on tantalum by sputtered neutral mass spectrometry (SNMS)Applications of Surface Science, 1982
- Comparative SNMS and SIMS studies of oxidized Ce and GdSurface Science, 1979
- Calculations of nuclear stopping, ranges, and straggling in the low-energy regionPhysical Review B, 1977
- Mass spectrometry of neutral molecules sputtered from polycrystalline metals by Ar+-ions of 100?1000 eVZeitschrift für Physik B Condensed Matter, 1975
- Adsorption of gases studied by secondary ion emission mass spectrometrySurface Science, 1975
- A method for surface analysis by sputtered neutralsPhysics Letters A, 1972
- Energieverteilungen bei der Festkörperzerstäubung durch IonenbeschußThe European Physical Journal A, 1970