FIB micromachined submicron thickness cantilevers for the study of thin film properties
- 1 January 2000
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 358 (1-2) , 146-151
- https://doi.org/10.1016/s0040-6090(99)00680-x
Abstract
No abstract availableKeywords
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