Combined resistive and calorimetric sensing of gases using a single silicon micromachined device
- 22 November 2002
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
No abstract availableThis publication has 3 references indexed in Scilit:
- A low power integrated catalytic gas sensorSensors and Actuators B: Chemical, 1993
- The Si planar pellistor: a low-power pellistor sensor in Si thin-film technologySensors and Actuators B: Chemical, 1991
- A substrate for thin-film gas sensors in microelectronic technologySensors and Actuators B: Chemical, 1990