Equipment for ion beam assisted deposition
- 1 January 1987
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 21 (1-4) , 570-573
- https://doi.org/10.1016/0168-583x(87)90906-2
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Optical and electrical properties of thin silver films grown under ion bombardmentPhysical Review B, 1986
- Effect of ion bombardment during deposition on the x-ray microstructure of thin silver filmsJournal of Vacuum Science & Technology A, 1985
- Nitride film formation by ion and vapour depositionNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1985
- A new machine for film formation by ion and vapour depositionNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1985