Experiments on gas cooling of wafers
- 1 October 1981
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research
- Vol. 189 (1) , 169-173
- https://doi.org/10.1016/0029-554x(81)90141-5
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Localized substrate heating during ion implantationJournal of Vacuum Science and Technology, 1978
- Target heating during ion implantationJournal of Vacuum Science and Technology, 1976