MOSFET Two-Dimensional Doping Profile Determination

Publisher Website

1 January 1993

book chapter
Published by Springer Nature

p. 365-368
https://doi.org/10.1007/978-3-7091-6657-4_90

Abstract

No abstract available

Keywords

This publication has 2 references indexed in Scilit:

Experimental characterization of two-dimensional dopant profiles in silicon using chemical staining
Applied Physics Letters, 1988
A Practical Guide to Splines
Published by Springer Nature ,1978