Damage Profiles in Ion Implanted Silicon

This publication has 6 references indexed in Scilit:

• The enhancement of the anodization of ion implanted silicon and its novel application
  Radiation Effects, 1981
• Strain profiles in ion-doped silicon obtained from X-ray rocking curves
  Physica Status Solidi (a), 1980
• X-ray study of lattice strain in boron implanted laser annealed silicon
  Journal of Applied Physics, 1980
• X-ray determination of strain and damage distributions in ion-implanted layers
  Applied Physics Letters, 1979
• Spatial distribution of energy deposited into atomic processes in ion-implanted silicon
  Radiation Effects, 1970
• The Dynamical Theory of X-Ray Diffraction
  Published by Elsevier ,1963