Computer integrated manufacturing (semiconductor processing)

Publisher Website

13 January 2003

proceedings article
Published by Institute of Electrical and Electronics Engineers (IEEE)

p. 1-3
https://doi.org/10.1109/emts.1989.68942

Abstract

No abstract available

Keywords

This publication has 1 reference indexed in Scilit:

The future of automation for high-volume Wafer fabrication and ASIC manufacturing
Proceedings of the IEEE, 1986