Metalorganic vapor phase epitaxy of GaP1−xNx alloys on GaP

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Abstract
We demonstrate a successful growth of GaP1−xNx alloys on GaP by metalorganic vapor phase epitaxy (MOVPE). This alloy system is predicted to have an extremely large miscibility gap, ranging from x=0.0000003 to 0.9999997 at 700 °C. However, metastable alloys (x≤0.04) have been obtained at the growth temperature of 630–700 °C. We focused on the growth condition dependence of solid composition (x). The nitrogen incorporation increases with decreasing growth temperature. It also increases with increasing growth rate, possibly due to nonequilibrium circumstances in the MOVPE growth. Low‐temperature photoluminescence (PL) measurements show that the band gap of GaP1−xNx shifts to lower energy with increasing x.