Abstract
The importance of the attachment cross-section for F-formation for the effective ionisation coefficients in SF6is discussed. The values of the dissociative attachment cross-section qafor F-formation for electron energies from 2 to 15 eV are very small compared with the values of qafor SF6-formation at low electron energies. However, the effect of the values of qafor F-formation on the effective ionization coefficients is very great. Calculations were carried out by a two-term Boltzmann equation analysis. It is pointed out that the measured grand total electron-SF6cross-sections were inconsistent with the sum of elastic and inelastic cross-sections used by many workers.

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