Some considerations of the thermodynamics and kinetics of the chemical vapour deposition of tungsten
- 1 September 1989
- journal article
- Published by Elsevier in Applied Surface Science
- Vol. 38 (1-4) , 312-337
- https://doi.org/10.1016/0169-4332(89)90552-7
Abstract
No abstract availableThis publication has 31 references indexed in Scilit:
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