New types of high efficiency solar cells based on a-Si

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Abstract
Three types of new structure a‐Si solar cells having more than 9% efficiency are presented. The first one has a high optical reflection back electrodemetal alloyed with optically transparent n‐type μc‐Si deposited on the conventional glass substrate a‐SiC/a‐Si heterojunctionsolar cell. The second type structure is an inverted p‐i‐nsolar cell having Ag/TiO2/a‐Si metal‐insulator‐semiconductor type back surfaceelectrode which more efficiently collects longer wavelength photocarriers just above the band edge. The third structure demonstrated here has a‐Si/polycrystalline tandem junction to pick up the energy of longer wavelength photons passing through the front side of the a‐Si solar cell. All key technologies proposed here are practical and offer more promised real alternatives for the fabrication of high efficiency a‐Si solar cells.