X-ray transmission through low atomic number particles
- 31 May 1989
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 9 (1-4) , 139-142
- https://doi.org/10.1016/0167-9317(89)90032-4
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Defects in x-ray masks: Detection and printabilityJournal of Vacuum Science & Technology B, 1987
- Application of the simulator “XMAS” on specific problems in sub-half-micron lithographyMicroelectronic Engineering, 1985
- Synchrotron Radiation X-Ray Lithography: Recent ResultsPublished by SPIE-Intl Soc Optical Eng ,1984