Compound Sidewall Spacer Technology for Submicron Mosfet
- 1 January 1992
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Quality Engineering Using Robust DesignTechnometrics, 1991
- Synthesis of High-Quality Ultra-Thin Gate Oxides for ULSI ApplicationsAT&T Technical Journal, 1988