Confocal scanning dark-field polarization microscopy
- 1 March 1994
- journal article
- Published by Optica Publishing Group in Applied Optics
- Vol. 33 (7) , 1274-1278
- https://doi.org/10.1364/ao.33.001274
Abstract
Dark-field imaging is attained by use of a λ/4 plate and an analyzer in a confocal scanning microscope. This dark-field microscope detects only the edge-diffracted wave whose polarization is different from that of the incident beam. The fact that images of photoresist patterns taken by the microscope show only the edges of the patterns confirms the dark-field nature of the imaging.Keywords
This publication has 8 references indexed in Scilit:
- Optical method for inspecting LSI patterns using reflected diffraction wavesApplied Optics, 1988
- Three-dimensional half-plane diffraction: Exact solution and testing of uniform theoriesIEEE Transactions on Antennas and Propagation, 1984
- Improvement in resolution by nearly confocal microscopyApplied Optics, 1982
- Application of the boundary-diffraction-wave theory to gaussian beams*Journal of the Optical Society of America, 1974
- Electromagnetic diffraction in optical systems, II. Structure of the image field in an aplanatic systemProceedings of the Royal Society of London. Series A. Mathematical and Physical Sciences, 1959
- STUDIES ON DEPOLARIZATION OF LIGHT AT MICROSCOPE LENS SURFACESThe Journal of cell biology, 1957