Optical method for inspecting LSI patterns using reflected diffraction waves
- 15 March 1988
- journal article
- Published by Optica Publishing Group in Applied Optics
- Vol. 27 (6) , 1187-1192
- https://doi.org/10.1364/ao.27.001187
Abstract
Optics InfoBase is the Optical Society's online library for flagship journals, partnered and copublished journals, and recent proceedings from OSA conferences.Keywords
This publication has 4 references indexed in Scilit:
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- A laser scan technique for electronic materials surface evaluationJournal of Electronic Materials, 1974
- Characteristics of a Propagating Gaussian BeamApplied Optics, 1970