NH4Oh-based etchants for silicon micromachining
- 30 April 1990
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 23 (1-3) , 1031-1035
- https://doi.org/10.1016/0924-4247(90)87084-v
Abstract
No abstract availableKeywords
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