Three-dimensional modelling of capacitive humidity sensors
- 1 October 1990
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 25 (1-3) , 243-247
- https://doi.org/10.1016/0924-4247(90)87038-k
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Capacitive humidity sensors in SACMOS technology with moisture absorbing photosensitive polyimideSensors and Actuators A: Physical, 1991
- Polymer-based capacitive humidity sensor: characteristics and experimental resultsSensors and Actuators, 1983
- A thin-film capacitance humidity sensorSensors and Actuators, 1981