thin films deposited by stoichiometric target sputtering

1 February 1998

journal article
Published by IOP Publishing in Superconductor Science and Technology

Vol. 11 (2) , 179-182
https://doi.org/10.1088/0953-2048/11/2/002

Abstract

Thin films of (NBCO) were fabricated on MgO (100) substrates by dc magnetron sputtering. The critical parameters for the deposition of the superconducting NBCO thin films were studied. The properties of films strongly depended on the substrate temperature and sputtering gas pressures. The x-ray diffraction pattern showed that the sputter-deposited thin films were highly c-axis oriented. Thin films with could be obtained reproducibly under the optimized sputtering conditions. This film also showed a critical current density of about at 77 K.

Keywords

This publication has 11 references indexed in Scilit:

Growth and Properties of NdBa₂Cu₃O_7-δ/PrBa₂Cu₃O_7-δ Quasi-Homoepitaxial Multilayers
Japanese Journal of Applied Physics, 1996
High rate melt texturing of Nd1−xBa2+xCu3O7−δ type superconductors
Applied Physics Letters, 1996
Fabrication and Characterization of NdBaCuO-Josephson Junctions on MgO-Substrates Damaged by a Focused Ion Beam
Japanese Journal of Applied Physics, 1996
Fabrication of Single Crystal of SmBa₂Cu₃O_7-x by the Modified Top-Seeded Solution Growth Method in Low Oxygen Partial Pressure Atmosphere
Japanese Journal of Applied Physics, 1995
High critical-current density of Nd(Ba,Nd)2Cu3O7−δ single crystals
Applied Physics Letters, 1995
High-quality c-axis oriented superconducting Nd1+xBa2−xCu3O7−d thin films deposited by the laser ablation method
Applied Physics Letters, 1995
Melt processing for obtaining NdBa2Cu3Oy superconductors with high T c and large J c
Applied Physics Letters, 1994
Flux Pinning in Melt-Grown NdBa₂Cu₃O_y and SmBa₂Cu₃O_y Superconductors
Japanese Journal of Applied Physics, 1994
Growth behavior of YBa2Cu3O7−δ and NdBa2Cu3O7−δ thin films observed by electron diffraction
Applied Physics Letters, 1991
Preparation of NdBa2Cu3O7−δ films in ultrahigh vacuum with a NO2 supersonic molecular beam
Applied Physics Letters, 1990