GaAs/AlGaAs ridge lasers with etched mirrors formed by an inductively coupled plasma reactor
- 15 September 1997
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 71 (11) , 1444-1445
- https://doi.org/10.1063/1.119931
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
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- Electron-cyclotron resonance etching of mirrors for ridge-guided lasersIEEE Photonics Technology Letters, 1995
- Mask erosion during dry etching of deep features in III-V semiconductor structuresSemiconductor Science and Technology, 1992
- Rectangular and L-shaped GaAs/AlGaAs lasers with very high quality etched facetsApplied Physics Letters, 1989
- Short cavity GaAs/AlGaAs multiquantum well lasers by dry etchingApplied Physics Letters, 1986