Glass waveguides on silicon for hybrid optical packaging
- 1 January 1989
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in Journal of Lightwave Technology
- Vol. 7 (10) , 1530-1539
- https://doi.org/10.1109/50.39094
Abstract
Work on deposited glass waveguides on silicon to form waveguides and filters is reviewed. The choice of these particular waveguides makes sense only as part of a consistent approach to optoelectronic packaging. Hybrid optical packaging on silicon (HOPS) is described and briefly compared with other techniques. For these packages, two waveguides were developed: a tight mode waveguide with a silicon nitride rib core for matching a semiconductor laser and a loose mode waveguide with a phosphosilicate glass core for matching an optical fiber.Keywords
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