Formation of In-As Complexes in Silicon Observed by the Perturbed-Angular-Correlation Technique
- 6 October 1986
- journal article
- research article
- Published by American Physical Society (APS) in Physical Review Letters
- Vol. 57 (14) , 1757-1760
- https://doi.org/10.1103/physrevlett.57.1757
Abstract
The formation of In-As pairs and clustering of As atoms in Si was studied via their electric field gradients by use of the perturbed-angular-correlation technique and as probe atoms. Clustering of As atoms strongly depends on As concentration and temperature treatment. The observed pairing between In and As atoms seems to be typical for the interaction between acceptor and donor atoms in Si and it explains the earlier observation that the presence of donor atoms influences the lattice site of acceptor atoms.
Keywords
This publication has 12 references indexed in Scilit:
- Detection of electronic perturbations in silicon after EC decay of 111In observed by PACNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1986
- Observation of Co-Dimer Formation during Thermal Annealing of Co-Implanted SiPhysical Review Letters, 1984
- A TDPAC study of the lattice location of implanted indium in siliconRadiation Effects, 1984
- Geometrical significance of the orientation of defect-induced electric field gradientsHyperfine Interactions, 1983
- Solid-phase-epitaxial growth and formation of metastable alloys in ion implanted siliconJournal of Vacuum Science & Technology B, 1983
- Hyperfine interaction and channeling studies of impurities implanted in siliconPhysica B+C, 1983
- TDPAC investigation of111Cd in silicon after recoil implantation of the parent nuclei111InPhysica Status Solidi (a), 1983
- Shallow junctions by high-dose As implants in Si: experiments and modelingJournal of Applied Physics, 1980
- Annealing behavior of In implanted in Si studied by perturbed angular correlationJournal of Applied Physics, 1977
- Diffusion Mechanisms and Point Defects in Silicon and GermaniumPhysica Status Solidi (b), 1968