Tungsten Films with the A15 Structure
- 1 April 1993
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 32 (4R)
- https://doi.org/10.1143/jjap.32.1759
Abstract
Influence of the atmosphere on the crystal structure of thin tungsten films produced by the evaporation method in vacuum was studied. While the crystal structure of the films produced in a high vacuum (e.g., 10-6 Pa) was bcc, the films took on an A15 structure in oxygen and nitrogen atmospheres (e.g., 10-4 Pa). This phenomenon did not occur with the introduction of inert gases such as helium and argon.Keywords
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