A practical high-power excimer lamp excited by a microwave discharge
- 1 May 1994
- journal article
- Published by Elsevier in Applied Surface Science
- Vol. 79-80, 507-513
- https://doi.org/10.1016/0169-4332(94)90463-4
Abstract
No abstract availableThis publication has 3 references indexed in Scilit:
- Observation of continuous D→X and B→X XeCl excimer fluorescence in a binary-gas microwave dischargeJournal of Applied Physics, 1991
- New high-efficiency quasi-continuous operation of an ArF(B→X) excimer lamp excited by microwave dischargeApplied Physics Letters, 1989
- New high-efficiency quasi-continuous operation of a KrF(B→X) excimer lamp excited by microwave dischargeApplied Physics Letters, 1989