Integrated SAW-AO optical switch on Si

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Abstract
The developments in the integration of the SAW acousto-optic Bragg deflector of guided optical waves in the ZnO thin film on a Si substrate and Schottky diode photodetectors on the same Si substrate are reported. Thin film lens has been fabricated by making use of a gradual film thickness change, the refractive index dispersion of the fundamental mode on the film thickness, and the mode cut-off property of the higher order modes in the area of the concave shaped converging lens of the ZnO film. The guided optical waves SAW-Bragg deflected, mode selected and lens focused are detected by the Schottky diode photo-detector incorporated at the boundary between the ZnO film wave guide and the Si substrate. A couple of detectors are located one for deflected and the other for undeflected waves.