OBSERVATION OF CHEMICAL-VAPOR-DEPOSITED SILICON ON SAPPHIRE BY TRANSMISSION ELECTRON MICROSCOPY
- 15 September 1967
- journal article
- conference paper
- Published by AIP Publishing in Applied Physics Letters
- Vol. 11 (6) , 196-198
- https://doi.org/10.1063/1.1755094
Abstract
The initial stages of the deposition of silicon on very thin sapphire platelets with exact (0001) orientation by the hydrogen reduction of SiCl4 have been observed using transmission electron microscopy.Keywords
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