Contact resistivity of TiN on p+-Si and n+-Si
- 31 August 1983
- journal article
- Published by Elsevier in Solar Cells
- Vol. 9 (3) , 179-183
- https://doi.org/10.1016/0379-6787(83)90044-3
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- Electrical characteristics of TiN contacts to N siliconJournal of Applied Physics, 1981
- Thermal stability of titanium nitride for shallow junction solar cell contactsJournal of Applied Physics, 1981
- TiN and TaN as diffusion barriers in metallizations to silicon semiconductor devicesApplied Physics Letters, 1980
- Models for contacts to planar devicesSolid-State Electronics, 1972
- Specific contact resistance of metal-semiconductor barriersSolid-State Electronics, 1971