Development of Scanning µ-RHEED Microscopy for Imaging Polycrystal Grain Structure in LSI
- 1 November 1989
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 28 (11A) , 2075-2077
- https://doi.org/10.1143/jjap.28.2075
Abstract
A new type of scanning µ-RHEED (reflection high energy electron diffraction) microscope has been developed. Three diffraction spots of a RHEED pattern were simultaneously selected for imaging. The scanning µ-RHEED images were obtained from the intensity change of the diffraction spots. The distribution of normally rotated micrograins inside the same plane's grain parallel to the surface was successfully observed from the scanning µ-RHEED images. Micrograin structures of poly-Si and Cu thin films were observed with a resolution of less than one micron.Keywords
This publication has 3 references indexed in Scilit:
- Micro-Probe Reflection High-Energy Electron Diffraction Technique. I. Determination of Crystallographic Orientations of Polycrystal-Silicon SurfacesJapanese Journal of Applied Physics, 1982
- System for reflection electron microscopy and electron diffraction at intermediate energiesReview of Scientific Instruments, 1975
- Electron back-scattering patterns—A new technique for obtaining crystallographic information in the scanning electron microscopePhilosophical Magazine, 1973