Ion beam sputter deposition of low loss Al2O3 films for integrated optics
- 1 November 1988
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 165 (1) , 1-9
- https://doi.org/10.1016/0040-6090(88)90673-6
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
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- Deposition of optical thin films by ion beam sputteringThin Solid Films, 1984
- Silicon nitride films on silicon for optical waveguidesApplied Optics, 1977
- MODES OF PROPAGATING LIGHT WAVES IN THIN DEPOSITED SEMICONDUCTOR FILMSApplied Physics Letters, 1969
- Some New Three Level Designs for the Study of Quantitative VariablesTechnometrics, 1960